Institution: It is expected that the power consumption of ASML High NA EUV lithography machines will be approximately 1400 kilowatts
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2024.11.04 09:37
TechInsights 表示,每台 ASML0.33NAEUV 光刻機的功耗就已經達到了 1170kW,而 0.55NA 光刻機的功耗預計將進一步增長至 1400kW。