Institution: It is expected that the power consumption of ASML High NA EUV lithography machines will be approximately 1400 kilowatts

智通财经
2024.11.04 09:37
TechInsights 表示,每台 ASML0.33NAEUV 光刻机的功耗就已经达到了 1170kW,而 0.55NA 光刻机的功耗预计将进一步增长至 1400kW。