Zhitong
2024.09.09 09:43

Taiwan Semiconductor's first ASML High NA EUV machine will be installed this month? Both sides respond

Industry sources have reported that Taiwan Semiconductor's first ASML High NA EUV lithography system equipment is expected to arrive at the factory this month. This equipment, costing over 400 million euros, cannot be disassembled due to the nature of its optical lens components. It is taller than a conference room and longer than the previous generation of equipment. Due to its unique and precise specifications, it may require transportation through highways connecting airports or ports, or special late-night transportation to the factory to avoid traffic congestion. In response to industry rumors, ASML mentioned today that they do not comment on individual customers. Taiwan Semiconductor stated that they do not respond to market rumors