ASML 首席技術官：明年將向客户交付首台 High-NA EUV 光刻機

華爾街見聞
2022.09.28 00:51
ASML 首席技術官 Martin van den Brink 日前受訪時表示，目前公司正有序推行其路線圖，在 EUV 之後是 High-NA EUV 技術。ASML 正在準備向客户交付首台 High-NA EUV 光刻機，大概會在明年某個時間點完成。（Bits & Chips）
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